Property control methods of diamond-like silicon-carbon films for micro- and nanoelectronics

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DOI Доступ к ресурсу на сайте издателя			10.46354/i3m.2019.emss.008

Title: Property control methods of diamond-like silicon-carbon films for micro- and nanoelectronics
Creator: Barinov, A. D.
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Popov, A. I.
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Makarov, Alexander A.
Date: 2019
DOI: 10.46354/i3m.2019.emss.008
Description: Possible methods for controlling the properties of amorphous diamond-like silicon-carbon films are considered: physical or structural modification, chemical modification, and physical-chemical modification. It is shown that the method of physical modification allows controlling in a wide range the properties of diamondlike silicon-carbon films (electrophysical, mechanical properties and surface morphology) without changing the chemical composition of the material. Chemical modification was carried out by introducing transition metal into diamond-like silicon-carbon films. The dependences of the phase composition, electrophysical and mechanical properties on the content and type of metal are analyzed. The method of physical-chemical modification is considered, when the introduced impurity changes not only the chemical composition, but also the structure of the material.

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collection(s): Научное управление
Identifier: смотреть в электронном каталоге НБ ТГУ
Type: статьи в сборниках
Source: 31st European modeling and simulation symposium (EMSS 2019) : held at the International Multidisciplinary Modeling and Simulation Multiconference (I3M 2019), Lisbon, Portugal, 18-20 September 2019. [S. l.], 2019. P. 42-46
Language: eng

Created: 09-09-2021

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Научное управление Property control methods of diamond-like silicon-carbon films for micro- and nanoelectronics